Q-521 Q-Motion® Miniature Linear Stage

Smallest linear stage with position control, high resolution and affordable price

Q-521 Q-Motion® Miniature Linear Stage
Product Description Specifications Downloads Quote / Order
  • Only 21 mm wide and 10 mm high
  • Direct position measurement with integrated incremental encoder, up to 1 nm resolution (optional)
  • Up to 1 nm encoder resolution
  • Up to 2 nm minimum incremental motion
  • Multi-axis system setups with adapter plate or bracket (available as an option)
  • Velocity 10 mm/s
  • Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available

Precision-class micropositioning stage

Q-Motion® stages are distinguished by their extremely small design and high position resolution in the nanometer range. The piezomotor drive principle and the electrical operation are inexpensive and can be customized.

PIShift piezo inertia drives

Self-locking when at rest, therefore no heat generation and no servo jitter. Velocity to 10 mm/s. 1 N push/pull force.

Direct-measuring principle

Versions with noncontact optical linear encoder available. Resolution 4 nm or 1  nm, depending on the version. Versions with encoder feature a reference point switch.

Vacuum and nonmagnetic environments

All Q-Motion® stages are suitable for operation in high vacuum to 10-6h hPa. Furthermore, ultrahigh vacuum variants for 10-9 hPa are also available. Nonmagnetic versions are available on request.

Fields of application

Industry and research, metrology, microscopy, micromanipulation, biotechnology, and automation.

Specifications

Datasheet Q-521

Version / Date
2017-11-15
Version / Date
2017-12-15
Version / Date
2017-05-09
Document language
pdf - 707 KB
pdf - 705 KB
pdf - 792 KB

Downloads

Datasheet

Datasheet Q-521

Version / Date
2017-11-15
Version / Date
2017-12-15
Version / Date
2017-05-09
Document language
pdf - 707 KB
pdf - 705 KB
pdf - 792 KB

Documentation

Short Instructions MP139EK

Q-5xx, Q-6xx PIShift Stages
Version / Date
3.0.0 2017-03-23
pdf - 696 KB

User Manual MP145

Q-521 Q-Motion Miniature Linear Positioning Stage, Piezoelectric Inertia Drive
Version / Date
2016-03-17
Version / Date
2016-03-15
Document language
pdf - 3 MB
pdf - 3 MB

3-D Models

Q-521 STEP

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Q-521.100
Q-Motion® miniature linear stage, 12 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 21 × 30 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-6 hPa
Q-521.130
Q-Motion® miniature linear stage, 12 mm travel range, linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 21 × 30 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-6 hPa
Q-521.140
Q-Motion® miniature linear stage, 12 mm travel range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 × 30 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-6 hPa
Q-521.14U
Q-Motion® miniature linear stage, 12 mm travel range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 × 30 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-9 hPa
Q-521.200
Q-Motion® miniature linear stage, 22 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 21 × 32 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-6 hPa
Q-521.230
Q-Motion® miniature linear stage, 22 mm travel range, linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 21 × 32 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-6 hPa
Q-521.240
Q-Motion® miniature linear stage, 22 mm travel range, linear encoder, 1 nm position resolution, 1 N push/pull force, dimensions 21 × 32 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-6 hPa
Q-521.24U
Q-Motion® miniature linear stage, 22 mm travel range, linear encoder, 1 nm position resolution, 1 N push/pull force, dimensions 21 × 32 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-9 hPa
Q-521.300
Q-Motion® miniature linear stage, 32 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 21 × 42 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-6 hPa
Q-521.330
Q-Motion® miniature linear stage, 32 mm travel range, linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 21 × 42 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-6 hPa
Q-521.340
Q-Motion® miniature linear stage, 32 mm travel range, linear encoder, 1 nm position resolution, 1 N push/pull force, dimensions 21 × 42 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-6 hPa
Q-521.34U
Q-Motion® miniature linear stage, 32 mm travel range, linear encoder, 1 nm position resolution, 1 N push/pull force, dimensions 21 × 42 × 10 mm (W × L × H), piezoelectric inertia drive, vacuum compatible to 10-9 hPa

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