N-111 NEXLINE® OEM Linear Actuator

Nanopositioning Over Long Travel Ranges, PiezoWalk® Principle

N-111 NEXLINE® OEM Linear Actuator
Product Description Specifications Downloads Quote / Order
  • Travel range 10 mm
  • Integrated direct-measuring linear encoder with resolution 5 nm
  • Force generation to 50 N
  • Holding force to 70 N

Fields of application

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI are principally vacuum-compatible and suitable for operation in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Specifications

Datasheet N-111

Version / Date
2018-04-17
Version / Date
2018-04-17
Version / Date
2017-11-16
Document language
pdf - 585 KB
pdf - 592 KB
pdf - 497 KB

Downloads

Datasheet

Datasheet N-111

Version / Date
2018-04-17
Version / Date
2018-04-17
Version / Date
2017-11-16
Document language
pdf - 585 KB
pdf - 592 KB
pdf - 497 KB

Documentation

User Manual MP110

N-111.20 and N-111.2A NEXLINE® OEM Piezo Stepping Actuators
Version / Date
1.0.1 2017-06-20
Version / Date
1.0.1 2017-07-20
Document language
pdf - 885 KB
pdf - 963 KB

User Manual MP142

N-111.201 and N-111.2A1 NEXLINE® OEM Piezo Stepping Actuators
Version / Date
1.0.1 2016-12-05
Version / Date
1.0.1 2016-12-05
Document language
pdf - 1 MB
pdf - 1 MB

3-D Models

N-111 STEP

Version / Date
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Document language English

Quote / Order

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