N-565 Linear Stage with the Highest Precision

NEXACT® Piezo Stepping Drive with Subnanometer Encoder Resolution

N-565 Linear Stage with the Highest Precision
Product Description Specifications Downloads Quote / Order
  • Ultraprecision: 2 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution
  • Long travel ranges: 13 mm, 26 mm or 52 mm
  • Self-locking when switched off: Saves energy and reduces generation of heat
  • Long lifetime and high reliability due to PiezoWalk® technology
  • Compact design: 65 mm width, 20 mm height

NEXACT® reference-class linear stage

Linear stage with NEXACT® PiezoWalk® drives allow high-precision positioning in the nanometer range over long travel ranges. They are equipped with direct-measuring linear encoders and crossed roller bearings for the highest accuracy.

PiezoWalk® technology: High resolution and low wear

The PiezoWalk® technology combines the technological advantages of piezo actuators with those of piezomotors. PiezoWalk® walking drives offer not only subnanometer resolution, high forces, and high stiffness but allow theoretically unlimited travel ranges. In contrast to other piezo-motorized drive principles, PiezoWalk® walking drives are not subject to sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. At rest, PiezoWalk® walking drives are self-locking, consume no energy, and do not generate heat.

Direct position measuring with PIOne linear encoder

The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured value, allows a position resolution of much less than one nanometer. In addition, due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal.

Fields of application

Sample manipulation, sample positioning, optics or mechanical components with high precision and stability, precision mechanics in the semiconductor industry, micromanipulation, microscopy, automation, applications in confined spaces, applications in a vacuum or nonmagnetic environments.

Specifications

Datasheet N-565

Version / Date
2018-07-03
Version / Date
2018-07-03
Version / Date
2018-08-15
Document language
pdf - 683 KB
pdf - 688 KB
pdf - 783 KB

Downloads

Datasheet

Datasheet N-565

Version / Date
2018-07-03
Version / Date
2018-07-03
Version / Date
2018-08-15
Document language
pdf - 683 KB
pdf - 688 KB
pdf - 783 KB

Documentation

User Manual MP148E110

N-565 NEXACT® Stage
Version / Date
2016-06-01
Version / Date
2016-06-01
Document language
pdf - 1 MB
pdf - 2 MB

Short Instructions MP137EK

N-524, N-565, N-765 NEXACT® Stages
Version / Date
2015-10-09
pdf - 803 KB

3-D Models

N-565 STEP

Document language English

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

N-565.160
Precision linear stage, 13 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 80 × 20 mm (B × L × H), NEXACT® piezoelectric walking drive
N-565.260
Precision linear stage, 26 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 110 × 20 mm (B × L × H), NEXACT® piezoelectric walking drive
N-565.360
Precision linear stage, 52 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 160 × 20 mm (B × L × H), NEXACT® piezoelectric walking drive