- Guided stage and actuator at the same time
- Travel range to 38 µm
- Resolution 0.1 nm
- Nonmagnetic versions available
- Particularly fast response behavior due to direct drive
- Highest linearity due to capacitive sensors
- Scanning microscopy
- Measuring technology
- Test procedures and quality assurance
- Fiber positioning
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
Suitable for sophisticated vacuum applications
All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.
Higher stiffness and dynamics due to PICMA® direct drive
Piezo nanopositioners with PICMA® direct drive have no mechanical translation. This allows fast response speeds as well as the highest possible stiffness and dynamics in the piezo drive range.
Product Change Notification Piezo Actuator Driven Products
User Manual PZ254
P-753 LISA High-Dynamics Piezo Nanopositioning Systems
Short Instructions PZ240
Piezo Positioning Systems: P-5xx / P-6xx / P-7xx
P-753 3-D model
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