D-015 • D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors

  • For applications with the highest precision requirements
  • Measuring range to 1000 µm
  • Resolution to 0.01 nm
  • Linearity error to 0.01 % with digital controller
  • E-509.CxA control electronics, compatible with E-500 piezo controller system
D-015 • D-050 • D-100 Capacitive Sensors
Product Description Specifications Downloads Quote / Order

Resolution

Capacitive sensors achieve resolutions into the picometer range over shorter distances. The theoretical measuring resolution is unlimited. In practice, scatter radiation, geometrical effects, and the measuring electronics noise influence the achievable accuracy. In conjunction with the E-509.C1A electronics, the effective noise factor of the D-100.00 sensors (100 µm) is 0.02 nm/ÖHz. Corresponds for example, to a resolution of 0.2 nm with 100 Hz bandwidth. The jumper-adjustable bandwidth of the electronics is up to 3 kHz.

In addition to the standard sensors listed here, PI offers customized versions, e.g., in measuring, geometry, material, electronics etc.

Fields of application

High-precision positioning.

Specifications

Datasheet

Datasheet D-015 • D-050 • D-100

Version / Date
2018-04-06
pdf - 563 KB
Version / Date
2018-04-06
pdf - 565 KB
Version / Date
2018-06-18
pdf - 860 KB

Downloads

Product Note

Product Note

Product Change Notification D-015

Version / Date
2021-12-20
pdf - 111 KB
English

Datasheet

Datasheet

Datasheet D-015 • D-050 • D-100

Version / Date
2018-04-06
pdf - 563 KB
Version / Date
2018-04-06
pdf - 565 KB
Version / Date
2018-06-18
pdf - 860 KB

Documentation

Documentation

User Manual PZ106

D-015, D-050, D-100 Capacitive Sensors

Version / Date
2003-11-05
pdf - 228 KB
English

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

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