Film Metrology in Wafer Inspection

Fast in Position Measurement and Defect Location

For every type of wafer, key prerequisites include uniform substrate and device layer thickness, along with a minimal defect density. Moreover, the wafer's electrical resistivity must closely align with specified standards. Certain films necessitate characterization, especially for assessing thickness, electrical resistivity, and surface quality and roughness. Reliable and fast measurement technologies help to prevent yield losses by detecting defects in an early stage, and thereby reducing costs.

PI is currently developing motion solutions for wafer positioning to facilitate the measurement of crucial wafer attributes.

Key Features of the Motion Solution

Repeatable and fast step & settle motion
Reliable and high quality for mass production
ISO 14644 cleanroom class 5 compatibility
Advanced ACS control features: Gantry Control, 2D mapping
Global design and metrology standards
Modular and scalable for customization
Fast and on time delivery: 12 weeks

θ Axis – Fine Rotary Indexing and Alignment of Wafer or Substrate

  • Highly accurate and repeatable 360° rotation without backlash
  • High velocities and accelerations due to magnetic direct drives
  • Direct-drive, slotless, brushless torque motor offers very low cogging torques and enables smooth speed and low error motions
  • Ultra-precise air bearings developed and manufactured in house
  • Next level performance to further optimize asynchronous performance specifications
    >> Technology of Direct Drive Torque Motors

Z Axis – Precision Wafer Alignment

  • Low profile, high load, compact superior design
  • Direct drive voice coil technology provides zero cogging, smooth motion with nanometer step size and response
  • High-resolution encoder for nanometer positioning of the motion platform
  • High-precision anti-creep crossed-roller bearings
  • Pneumatic counter balance prevent motor heating and prevents collisions
  • Economically priced with fast delivery
    >> Technology of Direct Drive Motors

XY Axis – Precision Step and Settle Motion

  • High-dynamics, coupled ironless linear motors on base axes for powerful, fast and precise motion
  • Dual encoder system ensures motor and yaw alignment, whilst provided high resolution and accuracy
  •  Multiple bearing stiff platform with low profile reduces abbe offsets and offers increased flatness and straightness
  •  Design allows high flexibility and customization
  • Optimized integrated cable management reduces motion drag and prolongs lifetime
  • Granite base ensures highest performance of the motion system
  • Optional active isolation
    >> Direct Drive Linear Motor Stages

Flexible and Easy Automation Control

  • EtherCAT® motion control and drive modules provide open network connectivity
  • Advanced algorithms provide fast step-and-settle, high in-position stability, and exceptional constant scanning velocity
    >> ServoBoost™
  • Extensive programming environment and support for higher level languages
  • Autofocus capabilities of the controller for dynamic focus adjustment
  • Learning control algorithms
  • Compact motion control with linear amplifier performance

Specifications

Motion Customized X axis Customized Y axis V-Z03 modified Theta Unit Tolerance
Active axis X Y Z T    
Travel range 365 355 5 Infinite mm  
Max. acceleration 15 15 3 41.8 rad/s² m/s² unloaded
Max. velocity 1000 1000 20 41.8 rad/s mm/s unloaded
Bidirectional repeatability ±0.4 ±0.4 ±0.25 ±1 arcsec µm Typ.
Accuracy (calibrated) ±1 ±1 ±0.5 ±2 arcsec µm Typ.
Straightness ±2.5 ±2.5 ±1 ±0.1 µm  
Flatness ±2.5 ±2.5 ±1 ±0.1 µm  
Pitch ±5 ±10 ±10 ±0.5 arcsecs  
Yaw ±10 ±10 ±10 ±0.5 arcsecs  
MIM 0.1 0.1 0.1 0.5 arcsec um  
Jitter ±10 ±10 ±10 ±0.2 arcsec nm  
Overall flatness 15 15 15 15 um  
Load capacity 5.0 5.0 5.0 5.0 kg  
Miscellaneous Customized X axis Customized Y axis V-Z03 modified Theta Unit Tolerance
Material Black anodized aluminum, stainless steel          
Overall mass 1450       kg ±5 %
Connector D-sub (m)          
Electrical properties  
Motion controller model number and version SP+EC-08080864NBN5NDNN (1pcs)
Drive module product number NPMpm2D20N0YBBANNB (1pcs)
NPMpm2B20N0YBBANNB (1pcs)
UDMsa-1B101-TNNNN (2pcs)
Digital I/O's NO
Safe Torque Off (STO) YES
Control integration solution Electric component inside frame
Accessories N/A
Facilities Requirements  
Power supply  
Supply voltage 220 - 240 VAC, single phase, 50-60 Hz
Supply power 1.2kW (estimated)

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