- Robust and industrially usable walking drive with PICMA® technology for extreme durability
- Fastest and strongest drive of its size class
- Variable runner lengths from 25 mm to 100 mm
- Precise, nanometer precision positioning of loads up to 5 kg
- Plug-and-play, thanks to PI proprietary controller technology
Fields of application
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
- Motion in strong magnetic fields and in a vacuum
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Nanometer precision and high feed force with PiezoWalk® walking drives
Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Suitable for sophisticated vacuum applications
Piezo motors from PI are principally vacuum-compatible and suitable for operation in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.
User Manual PZ271
N-331 Piezoelectric Walking Drive PICMAWalk
N-331 3-D model
N-331 3-D model
Controlling PI Positioners with External Zygo Interferometers
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