N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper

High Resolution with Optional Position Sensor

N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper
Product Description Specifications Downloads Quote / Order
  • Travel range 30 mm
  • Force generation to 10 N
  • With NEXACT® piezo walking drive
  • Optional: Integrated linear encoder with 20 nm resolution

Fields of application

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Specifications

Datasheet

Datasheet N-381

Version / Date
2019-01-21
Version / Date
2019-01-21
Version / Date
2019-01-22
Document language
pdf - 332 KB
pdf - 345 KB
pdf - 654 KB

Downloads

Datasheet

Datasheet

Datasheet N-381

Version / Date
2019-01-21
Version / Date
2019-01-21
Version / Date
2019-01-22
Document language
pdf - 332 KB
pdf - 345 KB
pdf - 654 KB

Documentation

Documentation

User Manual MP108

N-381.30 NEXACT® linear actuator
Version / Date
2018-11-21
Version / Date
2018-11-21
Document language
Documentation

User Manual MP177

N-381.3A NEXACT® linear actuator
Version / Date
2018-11-21
Version / Date
2018-11-21
Document language

3-D Models

3-D Models

N-381 3-D model

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