N-111 NEXLINE® OEM Linear Actuator

Nanopositioning Over Long Travel Ranges, PiezoWalk® Principle

N-111 NEXLINE® OEM Linear Actuator
Product Description Specifications Downloads Quote / Order
N-111.20, dimensions in mm
N-111.2A, dimensions in mm
  • Travel range 10 mm
  • Integrated direct-measuring linear encoder with resolution 5 nm
  • Force generation to 50 N
  • Holding force to 70 N

Application fields

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

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Specifications

Datasheet

Datasheet N-111

Version / Date
2019-01-21
Version / Date
2019-01-21
Version / Date
2019-01-22
Document language
Download
pdf - 761 KB
Download
pdf - 764 KB
Download
pdf - 670 KB
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Downloads

Datasheet

Datasheet

Datasheet N-111

Version / Date
2019-01-21
Version / Date
2019-01-21
Version / Date
2019-01-22
Document language
Download
pdf - 761 KB
Download
pdf - 764 KB
Download
pdf - 670 KB

Documentation

Documentation

User Manual MP142

N-111.201 and N-111.2A1 NEXLINE® OEM Piezo Stepping Actuators
Version / Date
1.0.3 2019-01-22
Version / Date
1.0.3 2019-01-22
Document language
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3-D Models

3-D Models

N-111 3-D model

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N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper

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N-310 NEXACT® OEM Miniature Linear Motor / Actuator

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N-216 NEXLINE® Linear Actuator

Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

Technology

PiezoWalk® Walking Drives

PiezoWalk® drives were developed more than 10 years ago for the semiconductor industry, a demanding industry when it comes to reliability, position resolution and long-term stability.
Learn more
Positioning in High Vacuum (HV) and Ultrahigh Vacuum (UHV)

Vacuum

Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
Learn more
Q-522 Q-Motion® Miniature Linear Stage with Incremental Encoder with up to 1 nm resolution (optional)

Incremental Sensors

PI uses incremental measurement systems for longer travel ranges, starting from approximately one millimeter. These sensors, which in most cases are optical sensors, achieve position resolution down to the picometer range.
Learn more
Parallel-Kinematic Precision Positioning Systems

Multi-Axis Positioners

Hexapod platforms are used for precision positioning and alignment of loads in all six degrees of freedom, three linear axes, and three rotational axes.
Learn more