N-111 NEXLINE® OEM Linear Actuator

Nanopositioning Over Long Travel Ranges, PiezoWalk® Principle

N-111 NEXLINE® OEM Linear Actuator

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Industrial precision positioning
Semiconductor technology
Semiconductor tests
Wafer inspection
Lithography
Nanoimprinting
Nanometrology
Motion in strong magnetic fields and in a vacuum

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

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Datasheet

Datasheet N-111

Version / Date

2019-01-21

Version / Date

2019-01-21

Version / Date

2019-01-22

Document language

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pdf - 761 KB

Download

pdf - 764 KB

Download

pdf - 670 KB

	N-111.201	N-111.2A1	Unit	Tolerance
Active axes	X	X
Motion and positioning
Travel range	10	10	mm
Travel range in analog mode	±2	±2	µm
Integrated sensor	–	Linear encoder
Resolution, open loop	0.025	0.025	nm	typ.
Resolution, closed loop	–	5 nm
Velocity (10 % duty cycle, full step mode)*	1.0	1.0	mm/s	max.
Velocity (100 % duty cycle, full step mode)*	0.6	0.6	mm/s	max.
Velocity (100 % duty cycle, nanostepping mode)**	0.4	0.4	mm/s	max.
Mechanical properties
Drive force (active)***	50	50	N	max.
Holding force (passive)	70	70	N	min.
Drive properties
Motor type	NEXLINE®	NEXLINE®
Operating voltage	-250 to +250	-250 to +250	V
Miscellaneous
Operating temperature range	0 to 55	0 to 55	°C
Material	Aluminum, stainless steel, titanium	Aluminum, stainless steel, titanium
Mass	245	325	g
Cable length	1.5	1.5	m	±10 mm
Connector	D-sub 25 (m)	D-sub 25 (m)
Recommended electronics	E-712.1AM	E-712.1AM

* Depending on drive electronics.

** Depending on drive electronics. The maximum velocity in nanostepping mode is designed for the best possible constancy so that no velocity variations occur when executing the steps.

*** Data refer to operation in full step mode.

All specifications based on room temperature (22 °C ±3 °C).

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Datasheet

Datasheet N-111

Version / Date

2019-01-21

Version / Date

2019-01-21

Version / Date

2019-01-22

Document language

Download

pdf - 761 KB

Download

pdf - 764 KB

Download

pdf - 670 KB

Documentation

User Manual MP142

N-111.201 and N-111.2A1 NEXLINE® OEM Piezo Stepping Actuators

Version / Date

1.0.3 2019-01-22

Version / Date

1.0.3 2019-01-22

Document language

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3-D Models

N-111 3-D model

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N-111.2A1

NEXLINE® OEM piezo stepping actuator, 10 mm, 50 N, linear encoder, 5 nm resolution

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N-111.201

NEXLINE® OEM piezo stepping actuator, 10 mm, 50 N

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