N-111.2A1
NEXLINE® OEM piezo stepping actuator, 10 mm, 50 N, linear encoder, 5 nm resolution
N-111 NEXLINE® OEM Linear Actuator
Nanopositioning Over Long Travel Ranges, PiezoWalk® Principle
- Travel range 10 mm
- Integrated direct-measuring linear encoder with resolution 5 nm
- Force generation to 50 N
- Holding force to 70 N
N-111.20, dimensions in mm
N-111.2A, dimensions in mm
N-111 NEXLINE® OEM Linear Actuator
Product Description
Specifications
Downloads
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Application fields
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
- Lithography
- Nanoimprinting
- Nanometrology
- Motion in strong magnetic fields and in a vacuum
Nanometer precision and high feed force with PiezoWalk® walking drives
Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Suitable for sophisticated vacuum applications
Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.
Specifications
Specifications
N-111.201 | N-111.2A1 | Unit | Tolerance | |
|---|---|---|---|---|
Active axes | X | X | ||
Motion and positioning | ||||
Travel range | 10 | 10 | mm | |
Travel range in analog mode | ±2 | ±2 | µm | |
Integrated sensor | – | Linear encoder | ||
Resolution, open loop | 0.025 | 0.025 | nm | typ. |
Resolution, closed loop | – | 5 nm | ||
Velocity (10 % duty cycle, full step mode)* | 1.0 | 1.0 | mm/s | max. |
Velocity (100 % duty cycle, full step mode)* | 0.6 | 0.6 | mm/s | max. |
Velocity (100 % duty cycle, nanostepping mode)** | 0.4 | 0.4 | mm/s | max. |
Mechanical properties | ||||
Drive force (active)*** | 50 | 50 | N | max. |
Holding force (passive) | 70 | 70 | N | min. |
Drive properties | ||||
Motor type | NEXLINE® | NEXLINE® | ||
Operating voltage | -250 to +250 | -250 to +250 | V | |
Miscellaneous | ||||
Operating temperature range | 0 to 55 | 0 to 55 | °C | |
Material | Aluminum, stainless steel, titanium | Aluminum, stainless steel, titanium | ||
Mass | 245 | 325 | g | |
Cable length | 1.5 | 1.5 | m | ±10 mm |
Connector | D-sub 25 (m) | D-sub 25 (m) | ||
Recommended electronics | E-712.1AM | E-712.1AM |
* Depending on drive electronics.
** Depending on drive electronics. The maximum velocity in nanostepping mode is designed for the best possible constancy so that no velocity variations occur when executing the steps.
*** Data refer to operation in full step mode.
All specifications based on room temperature (22 °C ±3 °C).
Downloads
Datasheet
Documentation
Documentation
User Manual MP142
N-111.201 and N-111.2A1 NEXLINE® OEM Piezo Stepping Actuators
Version / Date
1.0.3 2019-01-22
pdf - 734 KB
Version / Date
1.0.3 2019-01-22
pdf - 760 KB
3-D Models
3-D Models
N-111 3-D model
zip - 431 KB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
N-111.201
NEXLINE® OEM piezo stepping actuator, 10 mm, 50 N
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Compatible Electronics
Related Products
Technology
PiezoWalk® Walking Drives
PiezoWalk® drives were developed more than 10 years ago for the semiconductor industry, a demanding industry when it comes to reliability, position resolution and long-term stability.
Vacuum
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
Incremental Sensors
PI uses incremental measurement systems for longer travel ranges, starting from approximately one millimeter. These sensors, which in most cases are optical sensors, achieve position resolution down to the picometer range.
Multi-Axis Positioners
Hexapod platforms are used for precision positioning and alignment of loads in all six degrees of freedom, three linear axes, and three rotational axes.