V-573 Ultra-Precision Direct Drive Linear Nanopositioning Stage

Product overview

The V-573 nanopositioning linear stages are designed for high accuracy and repeatability, long life, and ease of integration with other PI stages and ACS-based controllers.

The V-573 stages offer superior linear trajectory performance compared to similarly-sized linear stages. With a powerful, non-cogging direct drive motor, the V-573 family of linear stages is ideally suited for use in production environments.

The absolute encoder models provide not only 1 nm resolution, but also a safe and efficient start, not requiring initialization or a referencing move. The non-contact direct-drive linear motor provides high dynamics and maintenance-free, friction-free operation. The ultra-precision cross roller bearings are intended to be low maintenance for the entire life of the stage.

V-573 linear stages are designed for XY mounting and are compatible with standard ACS-based A-8xx electronics.

3-phase motors for higher dynamics and friction-free, maintenance-free operation

The 3-phase linear motors driving the V-573 stage family transfer their force directly and friction-free to the motion platform. This eliminates backlash and play that can result from mechanical components like gears and screws in the drivetrain. Ideal for high-velocity, high-acceleration applications, these motors feature a maintenance-free, friction-free design, ensuring longevity in demanding 24/7 operations. The controller's current limit settings allow easy motor disablement, preventing damage to the stage or the application.

Crossed roller bearings improve load capacity, accuracy and lifetime

Crossed roller bearings offer a superior level of smoothness, straightness, and flatness, close to air bearing performance. By replacing the point contact of ball bearings with a line contact, rollers become considerably stiffer, requiring less preload. This reduction in friction results in smoother running, lower noise and higher accuracy. Crossed roller bearings can also support higher vertical and moment loads. The anti-creep mechanism prevents roller drift, enhancing reliability. Cleanroom grease is applied for low-maintenance operation.

Incremental and absolute encoder options

V-573 stages are equipped with linear encoders that measure positions with maximum accuracy directly on the motion platform. This enhances linearity and ensures immunity to mechanical play and elastic deformation which can result from indirect position feedback methods. Incremental encoders with 1 V_pp sine/cosine signal output require a home signal to initiate. In contrast, absolute linear encoders offer explicit position information, enabling immediate determination of the absolute position. This eliminates the need for referencing during power-on, enhancing both efficiency and safety during operation.

Choosing the right precision linear stage and motion controller

Selecting the right linear stage is pivotal for optimal performance in high-precision motion applications, such as semiconductor inspection and photonics alignment. Factors such as resolution, guiding accuracy, and repeatability must be carefully considered. The V-573 linear stage family provides exceptional geometric accuracy (flatness, straightness, pitch, and yaw) along with ±80 nanometers bi-directional repeatability. With high dynamic properties, featuring 1 g acceleration and 500 mm/s velocity, these fast and accurate motorized stages are ideal for automation of highly accurate positioning tasks required for the mass production of precision devices.

Together with PI’s A-8xx series motion controllers, these stages achieve unparalleled motion performance. PI’s EtherCAT-based controllers offer remarkable flexibility, facilitating the seamless integration of third-party equipment compatible with EtherCAT. Advanced algorithms in the A-8xx series motion controllers, such as PILOT, allow for higher dynamics with reduced motor currents, virtually increasing the motor’s force constant. Choose V-573 for precision, reliability, and efficiency in your motion applications.

Accessories and options

• Encoder type: 1 V_pp sin/cos (20 µm or 4 µm) or absolute encoder with BiSS output
• Single or multi-axis, ACS motion controllers and servo drives, integrated or distributed
• Cables compatible with the A-8xx series, ACS-based controllers
• Multi-axis XY and XYZ stage assemblies
• Granite base

Application fields

Sample inspection. Precision micro-assembly. Research. Biotechnology. Semiconductor test and inspection. Metrology. General automation. Device assembly. Laser micro-processing. Pick and place. Alignment of optics, micromechanics and photonics components.