Nanopositioning Piezo Flexure Stages

PI's piezo flexure stages combine sub-nanometer resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for applications in metrology, for super resolution microscopy, for interferometry or in inspection systems for semiconductor chip production. Piezo flexure stages are available for millisecond-settling precision positioning and dynamic scanning with up to several 100 Hertz in up to 6 degrees of freedom.

The unique combination of proprietary sensor design, frictionless flexure guides and long-life PICMA® piezo actuators makes for excellent and robust mechanics. Piezo motion controllers support positioning and scanning performance optimization, and are easily integrated over digital or analog interfaces and comfortable programming.

Multi-Axis Piezo Flexure Stages

Multi-Axis Piezo Flexure Stages

PIFOC® Objective & PInano® Sample Scanners for Microscopy

PIFOC® Objective & PInano® Sample Scanners for Microscopy

Positioning system based on piezoelectric actuators with a travel range of up to 250 µm and a repeatability of around 1 nm.

Linear Piezo Flexure Stages

XY Piezo Flexure Stages

XY Piezo Flexure Stages

Piezo Flexure Tilting Mirrors

Piezo Flexure Tilting Mirrors

XYZ Piezo Flexure Scanners

XYZ Piezo Flexure Scanners