P-733.Z High Dynamics Z Nanopositioner / Scanner
Direct Position Measuring and Clear Aperture
- Travel range 100 µm
- Direct position measuring with capacitive sensors
- Resolution to 0.3 nm, closed loop
- Clear aperture 50 mm × 50 mm
- Other versions available with additional degrees of freedom
- XY and XYZ versions available
- Vacuum-compatible versions on request
Application fields
- Scanning microscopy
- Confocal microscopy
- Mask/wafer positioning
- Surface measuring technology
- Nanoimprinting
- Micromanipulation
- Image processing / stabilization
- Nanopositioning with high flatness and straightness of motion
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
Specifications
Specifications
P-733.ZCD / P-733.ZCL | Unit | Tolerance | |
---|---|---|---|
Active axes | Z | ||
Motion and positioning | |||
Integrated sensor | Capacitive | ||
Travel range at -20 to 120 V, open loop | 115 | µm | +20 % / -0 % |
Travel range, closed loop | 100 | µm | |
Resolution, open loop | 0.2 | nm | typ. |
Resolution, closed loop | 0.3 | nm | typ. |
Linearity error | 0.03 | % | typ. |
Repeatability | <2 | nm | typ. |
Rotation around Z | <10 | µrad | typ. |
Rotation around X | <5 | µrad | typ. |
Rotation around Y | <5 | µrad | typ. |
Mechanical properties | |||
Stiffness | 2.5 | N/µm | ±20 % |
Resonant frequency, no load | 700 | Hz | ±20 % |
Resonant frequency, under load, 120 g | 530 | Hz | ±20 % |
Resonant frequency, under load, 200 g | 415 | Hz | ±20 % |
Push / pull force capacity | 50 / 20 | N | max. |
Drive properties | |||
Piezo ceramic | PICMA® P-885 | ||
Electrical capacitance | 6 | µF | ±20 % |
Miscellaneous | |||
Operating temperature range | -20 to 80 | °C | |
Material | Aluminum | ||
Dimensions | 100 mm × 100 mm × 25 mm | ||
Mass | 580 | g | ±5 % |
Cable length | 1.5 | m | ±10 mm |
Sensor / voltage connection | CD version: D-sub 7W2 (m) CL version: LEMO | ||
Recommended electronics | E-503, E-505, E-610, E-621, E-625, E-754 |
Downloads
Datasheet
Documentation
User Manual PZ103
P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors
3-D Models
P-733.Z 3-D model
Quote / Order
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Accessories
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Vacuum
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.

Digital Motion Controllers
Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.

Capacitive Sensors
Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.