M-850KLAH Large-Aperture High-Load Hexapod

MOTION | POSITIONING

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Products

PI is a worldwide leading supplier of solutions in the fields of motion and positioning. PI does not only develop and produce a broad range of positioning stages and actuators for linear, rotary and vertical motion or combinations of different axes. PI also adapts those solutions to customer-specific applications or supplies finished subsystems for motion and positioning.
- New Products
  
  New Products
  
  On this site you will find our current new products. If you want to find out more, just contact us: Our sales engineers will get back to you as quickly as possible.
- Product Finder
  
  Product Finder
  
  Select the product type specified by the axes of motion required. Selection of more criteria expands or shortens the list of results. Select more than one filter at a time, for example, to find positioning stages designed for higher load capacity, too.
- Customized Products
  
  Customized Products
  
  PI is fully at home where unconventional solutions are in demand. This is no longer limited to fields of research. Today, nanotechnology is also present in standardized industrial processes.
- Nanopositioning Piezo Flexure Stages
  
  Nanopositioning Piezo Flexure Stages
  
  PI's piezo flexure stages combine sub-nanometer resolution and guiding precision with minimum crosstalk.
  
  Multi-Axis Piezo Flexure Stages
  
  Multi-Axis Piezo Flexure Stages
  
  PI’s multi-axis piezo flexure stages allow positioning and scanning with sub-nanometer precision in up to 6 axis, including tip, tilt and yaw motion. Versions range from most compact cube design to large aperture and low profile.
  
  PIFOC® Objective & PInano® Sample Scanners for Microscopy
  
  PIFOC® Objective & PInano® Sample Scanners for Microscopy
  
  Piezo flexure stages and objective scanners of the PIFOC® and PInano® series offer high dynamics in positioning and scanning tasks. Well adapted solutions for XY specimen positioning parallel and vertical to the optical axis and Z focusing of the objective are available as standard products.
  
  Linear Piezo Flexure Stages
  
  Linear Piezo Flexure Stages
  
  PI’s nanopositioning stages and scanners combine nanometer-precision resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for reference applications in metrology, for microscopic processes, for interferometry or in inspection systems for semiconductor chip production.
  
  XY Piezo Flexure Stages
  
  XY Piezo Flexure Stages
  
  High-precision 2-axis nanopositioning systems integrate PICMA® piezo actuators for maximum reliability. Repeatable, drift-free positioning with optimal stability is possible by the use of high-quality nanometrology sensors.
  
  Piezo Flexure Tilting Mirrors
  
  Piezo Flexure Tilting Mirrors
  
  The high stiffness of piezo flexure mirror platforms allows for high dynamics and excellent position stability. The compact devices are frequently used for beam deflection in laser processing and laser steering. Their parallel-kinematic design creates identical performance in tip and tilt axis, with a common fixed pivot point and no change of polarization direction.
- Miniature Stages
  
  Miniature Stages
  
  Miniaturized stages and manipulators are essential in mobile applications for measuring and medical devices, in industrial microassembly or use for research, e.g. in UHV and non-magnetic environments.
  
  Miniature Linear Stages
  
  Miniature Linear Stages
  
  Miniature stages are essential in positioning tasks where available space is limited. Piezomotor solutions like Q-motion, PIline® and PiezoWalk® allow for the most compact stages due to their direct drive principle.
  
  Miniature Rotation Stages
  
  Miniature Rotation Stages
  
  Rotation stages with piezomotor make for particularly compact sizes. These compact rotation stages can be used in optics applications, where they position, for example, filters reliably and with excellent repeatability. Rotation stages can be mounted on linear stages without adapter and allow for flexible combinations of multi-axis positioning systems.
  
  Miniature Hexapods
  
  Miniature Hexapods
  
  The smallest devices for 6 degrees of freedom are built from Q-motion piezomotor stages, but also palm-size BLDC motor versions are available. Best overall homogeneity of performance is achieved with the classic hexapod design. Low-profile design is preferred when relatively large tilting angles are required.
- Linear Stages
  
  Linear Stages
  
  PI offers a wide range of motorized linear stages to supply high-precision industrial markets like semiconductor and photonics, as well as high-end research. Vacuum versions are available for a large number of different models. Multi-axis compositions can be set up with adapter brackets or specialized vertical stages and compatible rotation stages.
  
  Stages with PIMag® Magnetic Direct-Drive Linear Motor
  
  Stages with PIMag® Magnetic Direct-Drive Linear Motor
  
  Stages with PIMag® Magnetic Direct-Drive Linear Motor. The friction-free magnetic direct drive principle allows for most dynamic stages. Compared with motor-spindle-based stages, they use fewer mechanical components which results in less friction and backlash and thus more precision.
  
  Stages with Stepper, DC & Brushless DC (BLDC) Motors
  
  Stages with Stepper, DC & Brushless DC (BLDC) Motors
  
  Industrial applications in the production process such as laser processing benefit from the precise positioning accuracy of motorized positioning stages. Their low profile makes the variable stage series suitable for universal use, ranging from testing systems to production lines in precision automation.
  
  Vertical Stages with Stepper, DC & Brushless DC (BLDC) Motors
  
  Vertical Stages with Stepper, DC & Brushless DC (BLDC) Motors
  
  Vertical stages can be mounted on linear stages without adapter and allow for flexible combinations of multi-axis positioning systems.
  
  Miniature Linear Stages
  
  Miniature Linear Stages
  
  Miniature stages are essential in positioning tasks where available space is limited. Piezomotor solutions like Q-motion, PIline® and PiezoWalk® allow for the most compact stages due to their direct drive principle.
- Linear Actuators
  
  Linear Actuators
  
  Choose from the widest range of technologies the optimum for your special demands: Set-and-forget applications benefit from the specific features of piezomotors that provide excellent long-term stability, also for vacuum or nonmagnetic environments. Stepper and DC motor solutions are well-established and reliable for both industrial and research use.
  
  PiezoMike for Long-Term Stability
  
  PiezoMike for Long-Term Stability
  
  The PiezoMike linear actuators offer the high resolution of piezo direct drives, high forces and absolutely stable positioning. This makes them ideal for set-and-forget applications with high precision requirements like the positioning of optical elements in a laser application.
  
  Linear Actuators with Stepper & DC Servo Motors
  
  Linear Actuators with Stepper & DC Servo Motors
  
  Motorized linear actuators are indispensable in automation routines from industrial production to adjustment in research laboratories.
  
  PIMag® VC Voice Coil Actuators with High Dynamics & Force Control Option
  
  PIMag® VC Voice Coil Actuators with High Dynamics & Force Control Option
  
  Voice coil drives show very high velocities and allow for fast step-and-settle. Wear-free flexure guidings or mechanical guidings are available. The optional force control allows for stand-alone solutions in pressure-sensitive device testing.
  
  PiezoMove Lever Actuators
  
  PiezoMove Lever Actuators
  
  Nanopositioning Piezo Actuators
  
  Nanopositioning Piezo Actuators
  
  PIezoMove actuators are flexure-guided and have strokes up to 1 mm. Being very compact, they can be easily integrated. Generating forces of up to 10000 N and strokes of up to 100 µm are the characteristics of nanopositioning piezo actuators based on PICMA® multilayer piezos.
  
  PiezoWalk® Actuators with High Force & Stability
  
  PiezoWalk® Actuators with High Force & Stability
  
  PiezoWalk® actuators are highly specialized piezobased drives intended for integration. Designed for use in the semiconductor industry, they boost on reliability, position resolution and long-term stability. Their special features include minimum size with high force generation. The drive itself is resistant to magnetic fields.
  
  PIRest Active Piezo Shims
  
  PIRest Active Piezo Shims
- Rotation Stages
  
  Rotation Stages
  
  PI offers stages with all kinds of motorization and guiding options: air-bearing, torque motor driven, motorized worm-gear coupled, tiny piezomotor stages and specialized goniometer stages with orthogonal tip-tilt mounting option.
- XY Stages
  
  XY Stages
  
  Stability, precision and dynamics are crucial in the application fields of PI’s XY stages. They are the basis of high throughput rates and reliable operation. PI makes use of own developments in the fields of PIMag® magnetic linear motors and PIglide air bearings. Industrial production and quality control benefit from PI’s high-load XY stages and planar scanners.
- Hexapods
  
  Hexapods
  
  Hexapods provide 6 degrees of freedom in the most compact package. In combination with absolute measuring sensors, software and motion controllers that make the most complicated motion profiles easy to command, PI hexapods answer industrial requirements.
- Engineered Subsystems for Automation
  
  Engineered Subsystems for Automation
  
  Precision components, stable control and a great deal of experience in engineering are essential for high-precision complex motion and positioning solutions. PI is a supplier of technologically sophisticated drive components and high-precision positioners and also offers all levels of integration for engineered subsystems.
- Fast Multi-Channel Photonics Alignment
  
  Fast Multi-Channel Photonics Alignment Systems
  
  Piezo scanners take care of fast, continuous scanning tasks, where durability, dynamics, and precision matter. The larger travel ranges are realized with XYZ combinations or 6-axis hexapods. Integrated routines make it possible to perform single-axis alignments up to complex, multi-axis fiber array positioning within the shortest possible time.
- Motion Control Software
  
  Motion Control Software
  
  All digital controllers made by PI are accompanied by an extensive software package.
  
  Concepts
  
  Concepts
  
  PI pursues a cross-platform and hardware-independent concept in the design of the motion control software.
  
  User Programs and Their Functions
  
  User Programs and Their Functions
  
  Every PI controller is delivered with an extensive software package that supports the user in setting up and parametrizing the overall system.
  
  Software Tools for Hexapods
  
  Software Tools for Hexapods
  
  Programming
  
  Programming
  
  Customers can program or adapt their own user programs so that every PI controller can be seamlessly integrated into their application.
  
  Third Party Support
  
  Third Party Support
- Controllers & Drivers
  
  Controllers & Drivers
  
  The decision for a motion controller depends on the specific application situation. Various criteria, such as limited installation space, the number of axes or the type of control, determine which controller is the right one. PI offers a broad spectrum of controls and regulation concepts.
  
  Nanopositioning Piezo Controllers
  
  Nanopositioning Piezo Controllers
  
  PI offers the broadest range of digital and analog piezo control concepts that are adapted for optimal result in every application. Calibration of all piezo systems is done before delivery and all systems are delivered ready for operation.
  
  Piezo Drivers for Open-Loop Operation of Piezo Actuators
  
  Piezo Drivers for Open-Loop Operation of Piezo Actuators
  
  PI’s piezo drivers are available as benchtop or rackmount solutions, and as OEM modules also with separate power supply for minimized size. Piezo drivers integrate high-performance amplifiers specialized for different fields of applications.
  
  Motion Controllers & Drivers for Linear, Torque, Stepper & DC Servo Motors
  
  Motion Controllers & Drivers for Linear, Torque, Stepper & DC Servo Motors
  
  PI develops motion control solutions in-house to best adjust the features to the requirements of both drive and application. PI’s motion controllers are generally designed as single-channel devices and are available as benchtop, rackmount or OEM versions.
  
  Controllers & Drivers for Piezomotors
  
  Controllers & Drivers for Piezomotors
  
  Controller Systems for Multiple Axes & Mixed Drive Types
  
  Controller Systems for Multiple Axes & Mixed Drive Types
  
  Modular motion controller systems provide best flexibility for increasing the number of axes in a system. They allow the use of different drive types with only one user interface. The number of available models is continuously extended. Contact PI now for your individual controller setup!
  
  Hexapod Motion Controllers
  
  Hexapod Motion Controllers
  
  As unique as the hexapod mechanics, the motion controller is designed to make parallel kinematics algorithms as easy and unnoticed by the user as possible: All target positions are commanded in Cartesian coordinates. For best integration in automation processes, the Hexapod motion controller is available with industrial EtherCAT interface.
- Piezoelectric Transducers & Actuators
  
  Piezoelectric Transducers & Actuators
  
  Piezoelectric ultrasonic transducers are available in a wide range of shapes like disks, plates or tubes, and different performance levels. They can be adapted to application requirements by using different piezoceramic materials, electrodes, and assembling technology.
  
  Discs, Rods and Cylinders
  
  Piezoceramic Discs, Rods & Cylinders
  
  Plates and Blocks
  
  Piezoceramic Plates & Blocks
  
  Rings
  
  Piezoceramic Rings
  
  Tubes
  
  Piezoceramic Tubes
  
  Spheres and Hemispheres
  
  Piezoceramic Spheres & Hemispheres
  
  Bending Elements
  
  Piezoceramic Bending Elements
- Air Bearings & Stages
  
  Air Bearings & Stages
  
  Air bearing stages are used where vibration-free motion is required, velocity needs to be highly constant, and optimum angular repeatability is requested.
- Sensors, Components & Accessories
  
  Sensors, Components & Accessories
OEM

OEM

Customer- and application-specific product developments form the basis for success at PI. To this purpose, requirements have to be understood and a technological solution has to be found.
Applications
Applications & Markets

PI positioning systems are employed where technology is pushed forward in industry and research. This is done, for example, in semiconductor manufacturing, in medical engineering, in biotechnology, in plant engineering, in surface metrology, or in astronomy.
- Hexapods Support Industrial Robots
  
  Hexapods Support Industrial Robots
  
  Because the need for multi-axis and also precision robots in production and quality processes is on the increase, industry is looking out for new types of robotics. PI offers parallel-kinematic hexapods for these tasks.
- Scientific Instrumentation
  
  Scientific Instrumentation
  
  The term "scientific instrumentation" covers a variety of different applications, starting with microscopy via beamline processes through to the wide field of laboratory automation.
  
  Hexapod Systems for ALMA
  
  Hexapod Systems for ALMA
  
  Under the extreme conditions of the Atacama Desert, PI hexapods align the subreflectors to the large main reflectors of the ALMA radio telescopes.
  
  Double-Crystal Monochromator
  
  Double-Crystal Monochromator for an X-Ray Spectrometer
  
  The PI Beamline Instrumentation division’s aim is to develop application oriented solutions, e.g., this monochromator for an X-ray spectrometer.
  
  Materials Research in High Vacuum
  
  Materials Research in High Vacuum
  
  PI provides standard and custom high vacuum compatible positioning systems for materials research with high-energy X-rays.
  
  Active Vibration Isolation with Piezo Actuators
  
  Active Vibration Isolation with Piezo Actuators
  
  Active vibration isolation reduces settling times, increases precision in measurement and production sequences and achieves high throughput rates.
  
  Drive Technology for the ELT
  
  Drive Technology for the ELT
  
  The European - Extremely Large Telescope, in short E-ELT, is the largest terrestrial telescope for scientific evaluation of electromagnetic radiation.
- Semiconductor Technology
  
  Semiconductor Technology
  
  Lithographic processes are the reason why chips are getting smaller and smaller and why extremely fine structures can be realized on silicon wafers. Piezo drives have made these technical advances possible with their performance and reliability.
- Microscopy
  
  Microscopy
  
  Imaging processes increase efficiency across a number of fields, ranging from medical engineering to pharmaceutical research and manufacturing of semiconductors.
  
  Confocal Microscopy
  
  Adjustment of the Focal Planes in Confocal Microscopy
  
  Confocal microscopy is used to detect the structure of the sample surface through the shifting of the focal plane, for example in dermatology.
  
  Positioning Solutions for Total Internal Reflection Fluorescence Microscopy (TIRFM)
  
  Positioning Solutions for Total Internal Reflection Fluorescence Microscopy (TIRFM)
  
  Linear stages adjust the laser beam in the TIRF microscope. Precision positioning of the sample is possible by combining two XY stages.
  
  High-Speed Microscopy
  
  High-Speed Microscopy for Quality Control
  
  Specimen positioning on AFM scanners for atomic force microscopy is performed with piezo-based scanning stages which thus play a key role.
  
  Atomic Force Microscopy
  
  AFM Scanner for Atomic Force Microscopy
  
  Specimen positioning on AFM scanners for atomic force microscopy is performed with piezo-based scanning stages which thus play a key role.
  
  White Light Interferometry
  
  3-D Surface Inspection With Piezo-Based Positioning Systems from PI
  
  High-resolution camera systems are combined with white light interferometry for 3-D surface inspection with picometer resolution.
  
  Lens Positioning for 3-D Surface Inspection
- Silicon Photonics
  
  Silicon Photonics
  
  Silicon photonics allows data rates into the Tbit/s range and is therefore suitable for computer-aided services that require the highest possible transmission speeds.
  
  Photonics Packaging
  
  Automated Photonics Packaging
  
  An automated assembly and alignment system can reduce the manufacturing process for silicon photonics to only a few minutes. However, handling the delicate waveguides is indeed a major challenge as the integration of the light sources at a wafer level and connection of the optical inputs and outputs are difficult to perform.
  
  Optical Fiber Alignment
  
  Simultaneous Testing of Optical Components in Silicon Photonics
  
  Silicon photonics presents new challenges for the production of components as well as testing and slicing the wafers.
- Medical Technology
  
  Medical Technology
  
  Progress in pharmaceutical research, diagnostics, and therapy requires high-performance and precise position systems. In addition to high positioning precision, requirements for the drives often include compact dimensions, low energy consumption, speed, and high reliability.
  
  Endoscopy
  
  Chip-on-the-Tip Video Endoscopes with Miniature Drives
  
  Piezomotors and magnetic miniature drives offer the option of better focus and zoom functions in chip-on-the-tip video endoscopes.
  
  Ophthalmology
  
  High-Precision Drives in Ophthalmic Surgery
  
  The control and focusing of laser beams in ophthalmic surgery requires accurate positioning systems, such as piezo-driven tip/tilt mirror systems.
  
  Magnetic Resonance Imaging
  
  Nonsensitive Drives for Magnetic Resonance Tomography
  
  Piezo drives are well suited for magnetic resonance therapy, because they are not influenced by strong magnetic fields.
  
  Optical Coherence Tomography
  
  Piezo Technology and Optical Coherence Tomography (OCT)
  
  Piezo actuators and drives, e.g., PILine® OEM motors, ensure the high precision and position stability required for optical coherence tomography (OCT).
  
  Pipetting
  
  Piezomotors for Pipetting and Nanodispensing
  
  Piezomotors are suited for pipetting with small devices and sample separations and are able to move the pipettes in the vertical direction.
  
  Precision Dosing
  
  Dynamic Drives for Precision Dosing with Nanodispensers
  
  Piezo actuators are ideal for precision dosing with nanodispensers: They can switch valves directly, and can also work against a closing spring.
  
  Micropumps
  
  Piezoelectric Micropumps – Compact Design and High Performance
  
  Piezoelectric micro-diaphragm pumps offer high performance on small space – the drives allow a continuous flow and a variable flow rate.
  
  Image Stabilization
  
  Image Stabilization and Microscanning with Piezo Scanners
  
  Fast, piezo-based scanners operate with the necessary velocities in the video frequency range for image stabilization and microscanning.
  
  Adaptive Diaphragm Positioning
  
  Adaptive Diaphragm Positioning
  
  In radiation therapy, the individual leaves are adjusted so that the healthy tissue offers the optimum protection from the radiation.
- Materials Research
  
  Materials Research
  
  Efficiency has become an important buzzword these days. Materials research has paid a major contribution as the results have, for example, optimized processing methods. Methods such as X-rays and lasers or white light interferometry demand precise positioning of the specimens to be examined and of optics or beam control.
  
  Parallel Kinematics for Materials Research
  
  High-Load Parallel Kinematics for Materials Research
  
  The high-energy X-rays at beamlines provide numerous possibilities for materials research, such as checking welding seams of workpieces.
  
  Laser Beam Control
  
  Piezo Drives for Laser Beam Control
  
  Lasers are tools that can be used in many areas of application. At the same time, the laser beam control requires precision, dynamics, and reliability.
- Mechanical Engineering
  
  Mechanical Engineering
  
  Mechanical engineering and manufacturing technology require fast, reliable and energy-saving drive components. The spectrum ranges from piezo actuators to six-axis parallel kinematics which can communicate directly with CNC controls.
  
  Electrical Discharge Machining
  
  Piezo Actuators Accelerate Electrical Discharge Machining
  
  Precision components are manufactured using electrical discharge machining, often in large numbers. Vibrating piezo actuators make a crucial contribution here.
  
  Hexapods in Mechanical Engineering
  
  Hexapods in Mechanical Engineering
  
  PI hexapod 6-axis positioning systems can handle loads from 2 kg to several tons. Ideal for precision mechanical engineering applications.
- Automation
  
  Automation
  
  Piezo drives, magnetic direct drives, and hexapods are part and parcel of automation today. They operate precisely and reliably and have proven themselves under rugged conditions.
  
  Smarter Motion Positioning
  
  Smarter Motion Positioning
  
  Positioning and motion tasks in industrial automation such as those in assembly, semiconductor manufacturing, mechanical engineering, laser material processing, inspection systems or in additive manufacturing demand solutions that need to be robust and reliable.
  
  Hexapods in Microproduction
  
  Hexapods in Microproduction
  
  What do optical components and glass fibers in photonics, mobile devices, and high-quality wristwatches all have in common?
  
  Hexapods for Quality Assurance
  
  Hexapods for Quality Assurance
  
  Microproduction technology makes high-precision positioning systems absolutely necessary for both assembly and quality assurance.
  
  Magnetic Direct Drives
  
  Magnetic Direct Drives
  
  Magnetic direct drives, which include voice-coil actuators and linear drives, are often predestined here as the best solutions for many reasons.
  
  Motion Simulation with Hexapods
  
  Motion Simulation with Hexapods
  
  Motion simulation with hexapods with CIPA certificate from PI (Physik Instrumente) – vibrating tables are used for testing resistance to vibration.
  
  Flexibility in Dimensional Measuring
  
  Hexapod Systems in Automation
  
  Hexapods allow for an outstanding flexibility for a variety of samples of in-line automation systems by minimizing the space for motion robotics.
  
  Motion Compensation with Hexapods
  
  Motion Compensation with Hexapods
  
  Dynamic hexapods with piezo drives: Best conditions for motion compensation.
  
  Fast Piezo Ultrasonic Drives Advance Technology
  
  Fast Piezo Ultrasonic Drives Advance Technology
  
  When increased demands are placed on an application, ultrasonic piezo motors can prove to be a good alternative, as they can be used in many ways.
  
  Laser Material Processing
  
  Laser Material Processing
  
  PI offers automation platforms for high-precision and high-throughput laser material processing, such as laser marking, laser cutting and micromachining.
  
  Hexapods for Optical Metrology
  
  Hexapods Support Precise Measurement of Aspheres
  
  Testing aspherical shape accuracy requires the measurement of the smallest deviations in the nanometer range and short measuring and set-up times. The solution is a new interferometer from metrology company Mahr. As part of the overall system, the hexapod positions lenses and the calibration sphere.
- Beamline Instrumentation
  
  Beamline Instrumentation
  
  Scientific experiments pose their own challenges, and beamline X-ray experiments are even more special in themselves. However, the need for precision equipment is universal.
  
  Tomography Equipment
  
  Tomography Equipment
  
  Synchrotron Spectroscopy in Vacuum
  
  Synchrotron Spectroscopy in Vacuum
  
  Beam Preparation
  
  Beam Preparation
  
  Sample Positioning for Tomography
  
  Sample Positioning for Tomography
  
  Microscopy
  
  Microscopy
  
  Accelerator Technology
  
  Accelerator Technology
  
  Dynamic compensation of Lorentz forces at the XFEL accelerator structures: The particle accelerator XFEL at the DESY (German Electron Synchrotron) uses acceleration technology based on super-conducting acceleration structures, so-called resonators or cavities.
- Additive Manufacturing
  
  Additive Manufacturing
  
  Due to their high dynamics and pushing forces piezo actuators are highly suitable for the use in machines for additive manufacturing.
Technology
Know-How & Technology

PI combines its long-term experience in micro and nanopositioning technology with in-depth knowledge in the fields of mechanics, electronics, sensor engineering, and software. Thus, PI is able to offer its customers the most advanced drive technologies and system solutions.
- Piezo Technology
  
  Piezo Technology
  
  PI Ceramic offers a wealth of experience in the manufacturing of piezoceramic materials, components, and actuators. The piezoceramic materials can be adapted individually to perfectly fit the later use of the piezo components.
  
  Fundamentals of Piezo Technology
  
  Fundamentals of Piezo Technology
  
  Physical basics and explanations of piezo electricity and electromechanics.
  
  Properties of Piezo Actuators
  
  Properties of Piezo Actuators
  
  Characteristics of piezoceramic actuators: Displacement modes, forces and stiffnesses, dynamics. Ambient conditions.
  
  Piezoceramic Materials
  
  Piezoceramic Materials
  
  PI Ceramic offers a variety of different piezoelectric materials including lead-free materials.
  
  Manufacturing Technology
  
  Manufacturing Technology
  
  PI Ceramic offers a wide range of manufacturing technologies: Pressing or tape technology, assembling technology and testing procedures.
  
  PICMA® Technology
  
  PICMA® Technology
  
  Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.
  
  Integrated Piezo Actuators
  
  Integrated Piezo Actuators
  
  To avoid pull forces, these piezo elements are provided with a mechanical preload in mechanical cases or by means of flexure joints.
  
  DuraAct Patch Transducer Technology
  
  DuraAct Patch Transducer Technology
  
  Manufacture, functional principle and typical working parameters of DuraAct patch transducers explain the possible force generation and deflection.
  
  PIRest Actuators
  
  PIRest Actuators
  
  Active shims with long-term stability and nanometer resolution.
- Piezoelectric Drives
  
  Piezoelectric Drives
  
  Depending on the configuration and control, piezoceramic actuators can be used to create translational motions or as motors with a virtually unlimited travel range. The choice of drive depends on the requirements of the application.
  
  Piezo Actuators
  
  Piezo Actuators with and without Guiding
  
  Piezoelectric actuators offer subnanometer resolution and very short response times, making them ideally suitable for nanometer-precision positioning at high dynamics.
  
  PiezoWalk® Walking Drives
  
  PiezoWalk® Walking Drives
  
  PiezoWalk® drives were developed more than 10 years ago for the semiconductor industry, a demanding industry when it comes to reliability, position resolution and long-term stability.
  
  PILine® Ultrasonic Piezomotors
  
  PILine® Ultrasonic Piezomotors
  
  Ultrasonic piezomotors dispense with the mechanical complexity of classical rotary motor/gear/leadscrew combinations in favor of costs and reliability.
  
  Piezo Inertia Drives
  
  Piezo Inertia Drives
  
  Inertia Drives are space-saving and low-cost piezo-based drives with relatively high holding forces and a travel range that is only limited by the length of the runner.
  
  PiezoMike Linear Actuators
  
  PiezoMike Linear Actuators
  
  Compact, low-cost inertia drive principle (stick-slip). When at rest, the drive is self-locking, requires no current and generates no heat. It holds the position with maximum force.
  
  Comparison: Piezo Motors & Drive Technologies
  
  Comparison: Piezo Motors & Drive Technologies
  
  PIs drive technologies in comparison: Piezo motors, stepping drives, ultrasonic drives, and piezo inertia drives.
- Electromagnetic Drives
  
  Electromagnetic Drives
  
  Rotating electric motors such as DC or stepper motors are used in connection with screw or worm drives. Stepper motor systems with high-resolution encoders can perform minimum incremental motions of 10 nm with high reliability and repeatability.
  
  Rotating Electric Motors
  
  Rotating Electric Motors from PI
  
  Rotating electric motors such as DC or stepper motors are used in connection with screw or worm drives.
  
  PIMag® Magnetic Direct Drives
  
  PIMag® Magnetic Direct Drives
  
  In particular in terms of wear and dynamics, magnetic direct drives offer advantages compared to common spindle-based technologies.
  
  PIMag® 6-D Magnetic Levitation
  
  PIMag® 6-D Magnetic Levitation at Six Levels of Freedom
  
  PIMag® 6-D is an electromagnetic positioning system in which the passive platform levitates on a magnetic field and is actively guided by it.
  
  Hybrid Concept
  
  Piezo & Motor Hybrid Concept
  
  In the hybrid concept, the DC servo motor (large travel ranges) and the piezo drive (nanometer accuracy) are combined with one another.
- Parallel Kinematics
  
  Parallel Kinematics
  
  In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform. This means that all axes can be designed with identical dynamic properties, thus reducing the moved mass considerably. Hexapods are used for moving and precision positioning, aligning and displacing loads in all six degrees of freedom, i.e., three linear and three rotational axes.
  
  Parallel Kinematics
  
  Piezo Positioning Systems with Parallel Kinematics
  
  In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.
  
  Multi-Axis Positioners
  
  Multi-Axis Positioners and Stewart Platforms
  
  Hexapod platforms are used for precision positioning and alignment of loads in all six degrees of freedom, three linear axes, and three rotational axes.
  
  Hexapod as Motion Simulator
  
  Hexapod as Motion Simulator
  
  Motion simulators have higher motion dynamics requirements (shakers).
- Sensor Technologies
  
  Sensor Technologies
  
  The linearity and repeatability achieved are not possible without highest-resolution measuring devices. Accuracies in the range of a few nanometers and below require a position measurement method that can also detect motion in this range.
  
  Capacitive Sensors
  
  Capacitance Nanosensors
  
  Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.
  
  Incremental Sensors
  
  Linear Scale Encoders for Nanometrology & Nanopositioning
  
  PI uses incremental measurement systems for longer travel ranges, starting from approximately one millimeter. These sensors, which in most cases are optical sensors, achieve position resolution down to the picometer range.
  
  PIOne Optical Nanometrology Encoder
  
  PIOne Optical Nanometrology Encoder
  
  The PIOne high-resolution linear sensor developed by PI ensures a position resolution of far less than one nanometer with adequate measurement analysis.
  
  Comparison: Position Sensor Technologies
  
  Comparison: Nanopositioning Sensor Technologies
  
  Positioning systems that need to provide accuracies in the range of a few nanometers and below require a position measurement technique that can also detect motion in this range.
- Controllers & Software
  
  Controllers & Software
  
  Fast settling or extremely smooth low speed motion, high positional stability, high resolution and high dynamics – the requirements placed on piezo systems vary greatly and need drivers and controllers with a high degree of flexibility.
  
  Digital & Analog Interfaces
  
  Digital & Analog Interfaces
  
  Fast USB or TCP/IP interfaces as well as RS-232 are the standard interfaces supported by modern digital controllers from PI. Furthermore, PI also provides digital or analog real-time capable interfaces.
  
  EtherCAT Connectivity of PI Products
  
  EtherCAT Connectivity of PI Products
  
  PI offers high-precision drives for use as EtherCAT slave, or integrates with ACS Motion Controllers as Master, or 2nd Master in an existing architecture.
  
  Control of Piezo Actuators
  
  Piezo Controllers & Drivers for Nanopositioning Systems
  
  Characteristic properties of piezo actuators include high feed forces and fast response. Since piezoelectric actuators react to even the smallest change in voltage with a motion, noise or drift in the control must be avoided.
  
  Digital Motion Controllers
  
  Digital Motion Controllers
  
  Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.
- Guiding Systems & Force Transmission
  
  Guiding Systems & Force Transmission
  
  Flexure joints, mechanical guide components or magnetic bearings? Which kind of guiding system PI uses in its products depends on parameters such as travel range, required precision, load, lifetime, and ambient conditions.
  
  Classical Guiding Systems
  
  Comparison: Classical Guiding Systems and Force Transmission
  
  Positioners with travel ranges from several millimeters to one meter usually utilize traditional mechanical guide components such as ball bearings.
  
  Flexure Guiding Systems
  
  Flexure Guiding Systems for Nanopositioning & Piezo Actuators
  
  Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.
  
  Magnetic Bearings
  
  Magnetic Levitation & Precision Bearings for Nanopositioning
  
  Magnetic levitation allows excellent guiding accuracy in a plane, both linear and rotational.
  
  PIglide Air Bearing Technology
  
  PIglide Air Bearing Technology
  
  Multi-axis motion with nanometer precision and without friction.
- Vacuum
  
  Vacuum Compatible Linear & Rotary Stages, UHV Positioners
  
  Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
- Glossary
  
  PI Glossary for Technical Terms
  
  Find useful explanations of technical terms in the PI Glossary.
News & Events
News & Events

Take the opportunity to experience our products live and discuss your application with our development and sales engineers.
- PI-Japan E-Newsletter Abonnement
  
  PI-Japan E-Newsletter Abonnement
- News
  
  News & Press
  
  Latest news on PI: Browse our news archive.
- Trade Fairs and Events
  
  Trade Fairs and Events
  
  Take the opportunity to experience our products live and discuss your application with our development and sales engineers.
- PI Youtube Channel
  
  Subscribe to Headquarters Youtube Channel
  
  Find videos about our products, technologies and applications.
- PI LinkedIn Profile
  
  Follow our LinkedIn Profile
  
  Get weekly updates about our products and technologies.
Service
Service

Here you can find interesting information and online services from PI.
- On-Site Services
  
  On-Site Services
  
  The PI Global Services Division (GSD) is a team of PI skilled after-sales support engineers located around the world, dedicated to providing world class customer support.
- Extended Warranty
  
  Extended Warranty
- Contracted Services
  
  Contracted Services
- Ask an engineer!
  
  Ask an engineer!
  
  Quickly receive an answer to your question by email or phone from a local PI sales engineer.
- Downloads
  
  Downloads
  
  Find interesting downloads: Product documentations, brochures, catalogs, certificates, success stories and whitepaper.
  
  Product Documentation & Software
  
  Product Documentation & Software
  
  User manuals, technical notes, datasheets, CAD files for download.
  
  Catalogs, Brochures & Certificates
  
  Catalogs, Brochures & Certificates
  
  Find brochures, catalogs and certificates for download.
  
  Whitepapers & Success Stories
  
  Whitepapers & Success Stories
  
  Find whitepapers and success stories for download.
- Expert Consultancy from PI
  
  Expert Consultancy from PI
  
  If our customers need to solve a complex problem, they often require individual advice. We will come to visit you.
About PI
About PI

PI stands for technical excellence and continuous advance in precision positioning – driven by the passion for technology and its use in customer applications. The target of the PI Group is to develop this market and technological leadership even further and therefore secure a decisive competitive advantage for its customers.
- Technology Center
  
  Technology Center
  
  The technology center provides space not only for offices but also for application labs, metrology labs, and cleanrooms for vacuum or cryogenic chambers.
- Fractal Manufacturing Structure at PI
  
  Fractal Manufacturing Structure at PI
  
  PI manufactures in autonomous organization fractals. Each unit is responsible for its own product line, has all the necessary skills and production equipment.
- Metrology
  
  Metrology
  
  PI qualifies its products with external measuring equipment. These are calibrated in part and traceable to a national standard. Using the PIOne incremental encoder and capacitive sensors, PI manufactures own metrology for inclusion in PI products.
- Manufacturing in Cleanrooms at PI
  
  Manufacturing in Cleanrooms at PI
  
  PI has the capability to manufacture and qualify products under cleanroom conditions, which is extended and improved continually according to market needs.
- Heavy Load Hall
  
  Heavy Duty Hall for Positioning Systems Weighing Several Tons
  
  The product range from a two-ton hexapod to a ten-gram nanopositioner requires that PI can both manufacture and qualify these systems. For this reason, PI operates a heavy duty hall at its location in Karlsruhe for the assembly and measurement of masses up to five tons.
- Certified Quality
  
  Certified Quality
  
  PI aims to apply the same high quality, safety and environmental protection standards worldwide. The Integrated Management System reflects this commitment.
- The PI Group
  
  The PI Group
  
  PI stands for technical excellence and continuous advance in precision positioning – driven by the passion for technology and its use in customer applications.
- About PI miCos
  
  PI miCos GmbH, Germany
  
  As a member of the PI Group, PI miCos makes a strong contribution in the field engineered systems and is the center of expertise for positioning systems with magnetic drives.
- PI Worldwide
  
  PI Worldwide
  
  The PI Group represented by subsidiaries and dealers all over the world. Check here to find your local contact!
- How to Get to PI Japan
  
  How to Get to PI Japan
PI Japan Blog

PI Japan Blog

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6-Axis Precision Positioning & Alignment System for Inspection Systems

M-850KLAH Large-Aperture High-Load Hexapod

Product Description Specifications Downloads Quote / Order

Clear aperture 640 mm × 820 mm
Six Degrees of Freedom
Parallel-kinematics design: Significantly smaller and stiffer than serial-kinematics systems, better dynamics
Freely programmable, virtual pivot point
Sophisticated controller using vector algorithms

Datasheet M-850KLAH

Document language

Download

pdf - 670 KB

Download

pdf - 673 KB

	Max. load	Travel ranges	Rotation ranges	Typ. velocity	Dimensions
M-850KLAH Large Hexapod	Vertical: 2000 N In any direction: 500 N	X, Y, Z: ±25 mm	θ_X, θ_Y, θ_Z:±5°	X, Y, Z: 2 mm/s θ_X, θ_Y, θ_Z: 25 mrad/s	100 cm × 84 cm × 40 cm

Max. load

Travel ranges

Rotation ranges

Typ. velocity

Dimensions

M-850KLAH Large Hexapod

Vertical: 2000 N

In any direction: 500 N

X, Y, Z: ±25 mm

θ_X, θ_Y, θ_Z:±5°

X, Y, Z: 2 mm/s

θ_X, θ_Y, θ_Z: 25 mrad/s

100 cm × 84 cm × 40 cm

Download datasheet Go to download

Datasheet M-850KLAH

Document language

Download

pdf - 670 KB

Download

pdf - 673 KB

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M-850KLAH

Parallel Kinematics Hexapod, Large Clear Aperture, Load to 200 kg

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M-850KLAH Large-Aperture High-Load Hexapod

6-Axis Precision Positioning & Alignment System for Inspection Systems

Specifications

Datasheet M-850KLAH

Specifications

Downloads

Datasheet

Datasheet M-850KLAH

Quote / Order

Parallel Kinematics Hexapod, Large Clear Aperture, Load to 200 kg

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Multi-Axis Positioners

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