PIglide IS planar scanner with air bearings; Ironless 3-phase linear motor; 50 mm × 50 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; Incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

# A-311 PIglide IS Planar Scanner with Air Bearing

## High-Performance, Compact XY Nanopositioning System

- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Travel ranges to 300 mm × 400 mm
- Load capacity to 147 N
- Low profile
- Resolution to 1 nm

### Product overview

The high-precision PIglide IS XY planar scanner with air bearing has a flat design and is an alternative to the stacked XY stages. The efficient, compact design saves space in machines with limited installation space.

### PIMag® magnetic direct drive

3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.

Operation with digital controllers from leading manufacturers offers advanced control algorithms for improving the dynamics and error compensation.

### Accessories and options

- Encoder
- PIglide filter and air preparation kit
- Multi-axis motion controller and direct drives
- Machine bases
- Base plates made of granite and systems for reducing vibration

### Application fields

PIglide positioning systems are ideally suited for high-precision applications, such as inspection systems, laser marking, microscopy or scanning.

## Specifications

## Specifications

Motion | A-311.DA1 | A-311.DB1 | A-311.AA1 | A-311.AB1 | A-311.BA1 | A-311.BB1 | A-311.CA1 | A-311.CB1 | A-311.FB1 | A-311.GB1 | Tolerance |
---|---|---|---|---|---|---|---|---|---|---|---|

Active axes | X Y | X Y | X Y | X Y | X Y | X Y | X Y | X Y | X Y | X Y | |

Travel range in X | 50 mm | 50 mm | 100 mm | 100 mm | 150 mm | 150 mm | 200 mm | 200 mm | 300 mm | 300 mm | |

Travel range in Y | 50 mm | 50 mm | 100 mm | 100 mm | 150 mm | 150 mm | 200 mm | 200 mm | 300 mm | 400 mm | |

Acceleration in X, unloaded | 27.5 m/s² | 27.5 m/s² | 27.5 m/s² | 27.5 m/s² | 27.5 m/s² | 27.5 m/s² | 27.5 m/s² | 27.5 m/s² | 10 m/s² | 10 m/s² | max. |

Acceleration in Y, unloaded | 15 m/s² | 15 m/s² | 13 m/s² | 13 m/s² | 11 m/s² | 11 m/s² | 10 m/s² | 10 m/s² | 10 m/s² | 10 m/s² | max. |

Maximum velocity in X, unloaded | 2000 mm/s | 2000 mm/s | 2000 mm/s | 2000 mm/s | 2000 mm/s | 2000 mm/s | 2000 mm/s | 2000 mm/s | 1000 mm/s | 1000 mm/s | |

Maximum velocity in Y, unloaded | 2000 mm/s | 2000 mm/s | 2000 mm/s | 2000 mm/s | 2000 mm/s | 2000 mm/s | 2000 mm/s | 2000 mm/s | 1000 mm/s | 1000 mm/s | |

Orthogonality | ± 12.5 µrad | ± 12.5 µrad | ± 12.5 µrad | ± 12.5 µrad | ± 12.5 µrad | ± 12.5 µrad | ± 12.5 µrad | ± 12.5 µrad | ± 5 µrad | ± 25 µrad | typ. |

Straightness (Linear crosstalk in X with motion in Y) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 1 µm | ± 0.5 µm | max. |

Straightness (Linear crosstalk in Y with motion in X) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 1 µm | ± 0.5 µm | max. |

Flatness (Linear crosstalk in Z with motion in X) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 0.75 µm | ± 0.75 µm | ± 1.5 µm | ± 0.75 µm | max. |

Flatness (Linear crosstalk in Z with motion in Y) | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.25 µm | ± 0.5 µm | ± 0.5 µm | ± 0.75 µm | ± 0.75 µm | ± 1.5 µm | ± 0.75 µm | max. |

Pitch (Rotational crosstalk in θX with motion in Y) | ± 10 µrad | ± 10 µrad | ± 12.5 µrad | ± 12.5 µrad | ± 17.5 µrad | ± 17.5 µrad | ± 20 µrad | ± 20 µrad | ± 40 µrad | ± 20 µrad | max. |

Pitch (Rotational crosstalk in θY with motion in X) | ± 10 µrad | ± 10 µrad | ± 12.5 µrad | ± 12.5 µrad | ± 17.5 µrad | ± 17.5 µrad | ± 20 µrad | ± 20 µrad | ± 40 µrad | ± 20 µrad | max. |

Yaw (Rotational crosstalk in θZ with motion in X) | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 10 µrad | ± 10 µrad | ± 20 µrad | ± 10 µrad | max. |

Yaw (Rotational crosstalk in θZ with motion in Y) | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 5 µrad | ± 7.5 µrad | ± 7.5 µrad | ± 10 µrad | ± 10 µrad | ± 20 µrad | ± 10 µrad | max. |

Positioning | A-311.DA1 | A-311.DB1 | A-311.AA1 | A-311.AB1 | A-311.BA1 | A-311.BB1 | A-311.CA1 | A-311.CB1 | A-311.FB1 | A-311.GB1 | Tolerance |

Integrated sensor | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Incremental linear encoder | Absolute linear encoder | Absolute linear encoder | Absolute linear encoder | |

Bidirectional repeatability in X | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.15 µm | ± 0.1 µm | typ. |

Bidirectional repeatability in Y | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.1 µm | ± 0.15 µm | ± 0.1 µm | typ. |

Positioning accuracy in X, calibrated | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | typ. |

Positioning accuracy in X, uncalibrated | ± 1 µm | ± 1 µm | ± 1.5 µm | ± 1.5 µm | ± 2 µm | ± 2 µm | ± 2.5 µm | ± 2.5 µm | typ. | ||

Positioning accuracy in Y, calibrated | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | ± 0.2 µm | typ. |

Positioning accuracy in Y, uncalibrated | ± 1 µm | ± 1 µm | ± 1.5 µm | ± 1.5 µm | ± 2 µm | ± 2 µm | ± 2.5 µm | ± 2.5 µm | typ. | ||

Sensor signal | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | Sin/cos, 1 V peak-peak | BiSS-C | BiSS-C | BiSS-C | |

Sensor resolution | 1.2 nm | 1 nm | 1.2 nm | 1 nm | 1.2 nm | 1 nm | 1.2 nm | 1 nm | 1 nm | 1 nm | |

Sensor signal period | 20 µm | 20 µm | 20 µm | 20 µm | |||||||

Reference switch | Encoder index | Encoder index | Encoder index | Encoder index | |||||||

Limit switches | Hall effect, N/O contact, 5 V to 24 V, open collector | Hall effect, N/O contact, 5 V to 24 V, open collector | Hall effect, N/O contact, 5 V to 24 V, open collector | Hall effect, N/O contact, 5 V to 24 V, open collector | |||||||

Drive Properties | A-311.DA1 | A-311.DB1 | A-311.AA1 | A-311.AB1 | A-311.BA1 | A-311.BB1 | A-311.CA1 | A-311.CB1 | A-311.FB1 | A-311.GB1 | Tolerance |

Drive type | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | Ironless 3-phase linear motor | |

Nominal voltage | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | 48 V | |

Peak voltage | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | 300 V | 80 V | |

Nominal current, RMS | 3.2 A | 3.2 A | 3.2 A | 3.2 A | 3.2 A | 3.2 A | 3.2 A | 3.2 A | 2.9 A | 3.2 A | typ. |

Peak current, RMS | 6.9 A | 6.9 A | 6.9 A | 6.9 A | 6.9 A | 6.9 A | 6.9 A | 6.9 A | 10 A | 6.9 A | typ. |

Drive force in negative direction of motion in X | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 58 N | 39 N | typ. |

Drive force in negative direction of motion in Y | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 58 N | 39 N | typ. |

Drive force in positive direction of motion in X | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 58 N | 39 N | typ. |

Drive force in positive direction of motion in Y | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 39 N | 58 N | 39 N | typ. |

Peak force in negative direction of motion in X | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 200 N | 85 N | |

Peak force in negative direction of motion in Y | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 200 N | 85 N | |

Peak force in positive direction of motion in X | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | |

Peak force in positive direction of motion in Y | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | 85 N | |

Force constant | 12.3 N/A | 12.3 N/A | 12.3 N/A | 12.3 N/A | 12.3 N/A | 12.3 N/A | 12.3 N/A | 12.3 N/A | 19.9 N/A | 12.3 N/A | |

Resistance phase-phase | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 3.6 Ω | 5.6 Ω | 3.6 Ω | typ. |

Inductance phase-phase | 1.24 mH | 1.24 mH | 1.24 mH | 1.24 mH | 1.24 mH | 1.24 mH | 1.24 mH | 1.24 mH | 1.8 mH | 1.24 mH | |

Back EMF phase-phase | 10.1 V·s/m | 10.1 V·s/m | 10.1 V·s/m | 10.1 V·s/m | 10.1 V·s/m | 10.1 V·s/m | 10.1 V·s/m | 10.1 V·s/m | 16 V·s/m | 10.1 V·s/m | max. |

Pole pitch N-N | 24 mm | 24 mm | 24 mm | 24 mm | 24 mm | 24 mm | 24 mm | 24 mm | 24 mm | 24 mm | |

Mechanical Properties | A-311.DA1 | A-311.DB1 | A-311.AA1 | A-311.AB1 | A-311.BA1 | A-311.BB1 | A-311.CA1 | A-311.CB1 | A-311.FB1 | A-311.GB1 | Tolerance |

Guide | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with air preload | Air bearing guide with vacuum preload | Air bearing guide with vacuum preload | |

Moved mass in X, unloaded | 3000 g | 3000 g | 3000 g | 3000 g | 3000 g | 3000 g | 3000 g | 3000 g | 4000 g | 4000 g | |

Moved mass in Y, unloaded | 5500 g | 5500 g | 6500 g | 6500 g | 7500 g | 7500 g | 8500 g | 8500 g | 8500 g | 8500 g | |

Permissible push force in Z | 147 N | 147 N | 147 N | 147 N | 147 N | 147 N | 147 N | 147 N | 147 N | 147 N | max. |

Overall mass | 14500 g | 14500 g | 18500 g | 18500 g | 22500 g | 22500 g | 27500 g | 27500 g | 48000 g | 55000 g | |

Material | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | |

A-311.DA1 | A-311.DB1 | A-311.AA1 | A-311.AB1 | A-311.BA1 | A-311.BB1 | A-311.CA1 | A-311.CB1 | A-311.FB1 | A-311.GB1 | Tolerance | |

Connector | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-Sub 3W3 (m) | D-Sub 3W3 (m) | |

Sensor connector | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | D-sub 15-pole (m) | |

Operating pressure | 415 to 485 (60 to 70 psi) kPa | 415 to 485 (60 to 70 psi) kPa | 415 to 485 (60 to 70 psi) kPa | 415 to 485 (60 to 70 psi) kPa | 415 to 485 (60 to 70 psi) kPa | 415 to 485 (60 to 70 psi) kPa | 415 to 485 (60 to 70 psi) kPa | 415 to 485 (60 to 70 psi) kPa | 415 to 485 (60 to 70 psi) kPa | 415 to 485 (60 to 70 psi) kPa | |

Air consumption | 56 L/min | 56 L/min | 56 L/min | 56 L/min | 56 L/min | 56 L/min | 56 L/min | 56 L/min | 56 L/min | 56 L/min | max. |

Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | ||||||||

Recommended controllers / drivers | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | |

Operating temperature range | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C | +15 to +25 °C |

Note on the linear and rotational crosstalk: Dependent on the flatness of the surface, on which the stage is mounted.

Note on the velocity and acceleration: It can be limited by payload, controller, or drive performance.

Note on the permissible push force: Assumes that the payload center of gravity is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only.

Note on the sensor resolution: Assumes a 4096x interpolation. Contact PI for the use of other factors.

Note on the positioning accuracy: Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values.

Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.

Note on the operating pressure: To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

All specifications apply per axis, if not otherwise described.

### Downloads

### Datasheet

### Documentation

### User Manual A311D0002

A-311.FXx/.GXx PIglide: XY Planar Scanner with Air Bearings

### User Manual A311D0001

A-311 PIglide IS: Planar XY Air Bearing Stage

### 3-D Models

### 3-D model A-311

### White Paper

### Air Bearings: When to Use and When to Avoid in Your Motion Application

All Positioning Stages are not Created Equal. Author: Matt Reck, PI

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

PIglide IS planar scanner with air bearings; Ironless 3-phase linear motor; 50 mm × 50 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; Absolute linear encoder, 1 nm sensor resolution, BiSS-C

PIglide IS planar scanner with air bearings; Ironless 3-phase linear motor; 100 mm × 100 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; Incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

PIglide IS planar scanner with air bearings; Ironless 3-phase linear motor; 100 mm × 100 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; Absolute linear encoder, 1 nm sensor resolution, BiSS-C

PIglide IS planar scanner with air bearings; Ironless 3-phase linear motor; 150 mm × 150 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; Incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

PIglide IS planar scanner with air bearings; Ironless 3-phase linear motor; 150 mm × 150 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; Absolute linear encoder, 1 nm sensor resolution, BiSS-C

PIglide IS planar scanner with air bearings; Ironless 3-phase linear motor; 200 mm × 200 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; Incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

PIglide IS planar scanner with air bearings; Ironless 3-phase linear motor; 200 mm × 200 mm travel range (X × Y); 147 N load capacity; 2000 mm/s × 2000 mm/s maximum velocity; Absolute linear encoder, 1 nm sensor resolution, BiSS-C

PIglide IS planar scanner with air bearings; ironless 3-phase linear motor; 300 mm × 300 mm travel range (X × Y); 147 N load capacity; 1000 mm/s × 1000 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C

PIglide IS planar scanner with air bearings; Ironless 3-phase linear motor; 300 mm × 400 mm travel range (X × Y); 147 N load capacity; 1000 mm/s × 1000 mm/s maximum velocity; Absolute linear encoder, 1 nm sensor resolution, BiSS-C