HPS-170 High-precision Linear Stage for Heavy Loads
Excellent Repeatability and Travel Accuracy
- Travel ranges from 52 to 205 mm (2 to 8")
- Max. velocity to 100 mm/s
- Load capacity to 35 kg
- Optional: Linear encoder for direct position measuring
Reference-class linear positioner
High travel accuracy and load capacity due to crossed roller guides. Precision ball screw. Stress-relieved aluminum base for highest stability. Mechanical limit switches.
Drive types
- Closed-loop DC servo motor with rotary encoder on the motor shaft
- 2-phase stepper motor for high torque even at low velocities and high resolution
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.
Minimum incremental motion
In conjunction with the SMC Hydra controller, versions with stepper motor and integrated linear encoder achieve repeatable minimum incremental motion in the range of the sensor resolution. The same configuration achieves constant low velocities of a few sensor increments per second.
Application fields
Sample inspection. Semiconductor technology. Metrology. Laser marking.
Specifications
Specifications
Motion and positioning | 626291x00 | 626291x10 | 626292x00 | 626292x10-0001 | Unit | Tolerance |
---|---|---|---|---|---|---|
Travel range | 52 / 102 / 155 / 205 | 52 / 102 / 155 / 205 | mm | |||
Integrated sensor | Rotary encoder | Rotary encoder Linear encoder | – | Linear encoder | ||
Sensor signal rotary encoder | A/B quadrature, RS-422 | A/B quadrature, RS-422 | – | |||
Sensor signal linear encoder | – | A/B quadrature, RS-422 | – | Sin/cos, 1 V peak-peak, 20 µm signal period | ||
Design resolution | 0.1 | 0.05 | 10 (full step) | 0.005 | µm | |
Sensor resolution rotary encoder | 20000 | 20000 | – | Cts./rev. | ||
Sensor resolution linear encoder | – | 0.05 | – | – | µm | Typ. |
Minimum incremental motion | 0.2 | 0.2 | 0.2 | 0.05 | µm | Typ. |
Unidirectional repeatability | 0.2 | 0.2 | 0.2 | 0.05 | µm | Typ. |
Bidirectional repeatability | ±2 | ±0.2 | ±2 | ±0.05 | µm | Typ. |
Pitch | ±20 / ±25 / ±30 / ±35 | ±20 / ±25 / ±30 / ±35 | ±20 / ±25 / ±30 / ±35 | ±20 / ±25 / ±30 / ±35 | µrad | Typ. |
Yaw | ±40 | ±40 | ±40 | ±40 | µrad | Typ. |
Straightness / flatness | ±0.75 / ±1 / ±2 / ±3 | ±0.75 / ±1 / ±2 / ±3 | ±0.75 / ±1 / ±2 / ±3 | ±0.75 / ±1 / ±2 / ±3 | µm | Typ. |
Max. velocity | 100 | 100 | 35 | 35 | mm/s |
Mechanical properties | 626291x00 | 626291x10 | 626292x00 | 626292x10-0001 | Unit | Tolerance |
---|---|---|---|---|---|---|
Guide type | Crossed roller guide with anti-creep system | Crossed roller guide with anti-creep system | Crossed roller guide with anti-creep system | Crossed roller guide with anti-creep system | ||
Drive screw type | Ball screw | Ball screw | Ball screw | Ball screw | ||
Drive screw pitch | 2 | 2 | 2 | 2 | mm | |
Load capacity | 350 | 350 | 350 | 350 | N | Max. |
Push/pull force | 100 | 100 | 150 | 150 | N | Max. |
Holding Force | 20 | 20 | 60 | 60 | N | Max. |
Permissible lateral force | 150 | 150 | 150 | 150 | N | Max. |
Permissible torque Mx in θX | 400 | 400 | 400 | 400 | Nm | Max. |
Permissible torque My in θY | 300 | 300 | 300 | 300 | Nm | Max. |
Permissible torque Mz in θZ | 300 | 300 | 300 | 300 | Nm | Max. |
Drive properties | 626291x00 | 626291x10 | 626292x00 | 626292x10-0001 | Unit | Tolerance |
---|---|---|---|---|---|---|
Motor type | DC motor | DC motor | 2-phase stepper motor | 2-phase stepper motor | ||
Operating voltage, nominal | 24 | 24 | 24 | 24 | V | Nom. |
Operating voltage, max. | 48 | 48 | 48 | 48 | V | Nom. |
Peak current, RMS | 3.8 | 3.8 | 1.2 | 1.2 | A | Typ. |
Torque constant, RMS | 0.03 | 0.03 | N·m/A | Typ. | ||
Electrical time constant | 6 | 6 | ms | |||
Resistance phase-phase | 0.62 | 0.62 | 3.3 | 3.3 | Ω | Typ. |
Inductance phase-phase | 0.13 | 0.13 | 2.8 | 2.8 | mH | Typ. |
Back EMF phase-phase | 0.00349 | 0.00349 | V/kRPM | Max. | ||
Limit switch | Mechanical, N/C contact, to 30V, NPN | Mechanical, N/C contact, to 30V, NPN | Mechanical, N/C contact, to 30V, NPN | Mechanical, N/C contact, to 30V, NPN |
Miscellaneous | 626291x00 | 626291x10 | 626292x00 | 626292x10-0001 | Unit | Tolerance |
---|---|---|---|---|---|---|
Operating temperature range | 5 to 40 | 5 to 40 | 5 to 40 | 5 to 40 | °C | |
MTBF | 10000 | 10000 | – | – | h | |
Material | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | ||
Mass | 5.1 / 5.8 / 6.6 / 7.5 | 5.1 / 5.8 / 6.6 / 7.5 | 5 / 5.7 / 6.5 / 7.4 | 5 / 5.7 / 6.5 / 7.4 | kg | ±5 % |
Moved mass | 1.1 | 1.4 | 1.1 | 1.4 | ||
Connector | D-sub 15 (m) | Motor: D-sub 15 (m) Sensor: D-sub 9 (m) | D-sub 15 (m) | Motor: D-sub 15 (m) Sensor: D-sub 9 (m) | ||
Recommended controllers | C-863 (single axis) with C-863.AD12 line driver C-884 (to 6 axes) with C-863.AD12 line driver C-885 with C-863.20C885 (to 40 axes) and C-863.AD12 line driver ACS modular controller | C-863 (single axis) with C-863.AD12 line driver C-884 (to 6 axes) with C-863.AD12 line driver C-885 with C-863.20C885 (to 40 axes) and C-863.AD12 line driver ACS modular controller | C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller |
Downloads
Product Note
Product Change Notification Motor Driven Products
Datasheet
Documentation
User Manual HPS-170
High Precision Linear Stage
3-D Models
HPS-170 3-D model
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