P-620.2 – P-629.2 PIHera XY Piezo Stage

High-precision XY Nanopositioners with Variable Travel Ranges

P-620.2 – P-629.2 PIHera XY Piezo Stage
Product Description Specifications Downloads Quote / Order
  • Travel ranges 50 to 1800 µm
  • Resolution to 0.1 nm
  • Positioning accuracy 0.02 %
  • Direct metrology with capacitive sensors
  • X, XY, Z, XYZ versions

Fields of application

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test procedures and quality assurance
  • Photonics
  • Fiber positioning
  • Semiconductor technology

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Specifications

Datasheet P-620.2 – P-629.2

Version / Date
2018-04-16
Version / Date
2018-04-16
Version / Date
2018-05-17
Version / Date
2018-07-03
Document language
pdf - 674 KB
pdf - 1 MB
pdf - 773 KB
pdf - 859 KB

Downloads

Datasheet

Datasheet P-620.2 – P-629.2

Version / Date
2018-04-16
Version / Date
2018-04-16
Version / Date
2018-05-17
Version / Date
2018-07-03
Document language
pdf - 674 KB
pdf - 1 MB
pdf - 773 KB
pdf - 859 KB

Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
Version / Date
1.1.0 2018-08-07
Version / Date
1.1.0 2018-08-07
Document language
pdf - 3 MB
pdf - 3 MB

Short Instructions PZ240

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
Version / Date
5.0.0
pdf - 908 KB

3-D Models

P-62x.2 STEP

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Versions with Sub-D connector (m)

Versions with LEMO connector

Linear positioners without position sensor

Linear positioners, vacuum compatible to 10-9 hPa

P-629.2UD
Precise PIHera XY nanopositioning system, 1500 µm × 1500 µm, direct position measuring, capacitive sensors, Sub-D connector, vacuum compatible to 10-9 hPa

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