M-850KTVH Vacuum Hexapod 6-Axis Positioner

Parallel-Kinematics System for Wide Temperature Ranges

M-850KTVH Vacuum Hexapod 6-Axis Positioner
Product Description Specifications Downloads
  • Six Degrees of Freedom, works in any orientation
  • Vacuum-compatible to 10-6 hPa
  • 200 kg load capacity (vertical) 2000 N
  • Repeatability to ±1 µm
  • Encoder resolution to 5 nm

Specifications

Datasheet M-850KTVH

Document language
pdf - 685 KB
pdf - 684 KB

Downloads

Datasheet

Datasheet M-850KTVH

Document language
pdf - 685 KB
pdf - 684 KB

Technology