Precision-class Z stage
Extremely accurate and reliable positioning. Anti-creep crossed roller guides for smooth feed at high loads. Non-contact limit and reference switches (Hall effect).
Voice coil direct drive
Voice coil motors are direct drives. In direct drives, the force of the drive element is transmitted directly to the load and move without the use of mechanical transmission elements such as coupling, drive screw, or gearhead. Voice coil drives have another advantage is quick responsibility.
Highly accurate position measuring with incremental linear encoder
Noncontact option encoders measure the position directly at the platform with greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Crossed roller guide
With cross roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy. Force-guided rolling element cages prevent cage creep.
Pneumatic counterbalance
Integrated with pneumatic counterbalance which can reach up to 150 N.
Application fields
Precision positioning in industry and research. Semiconductor inspection.
