L-310.021211V6, dimensions in mm
Precision-class Z stage
High guide accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for high stability. Noncontact limit and reference switches (Hall effect). Reference switch with direction sensing in the middle of the travel range. Integrated linear encoder, installed centrically.
Applications and use cases
Vacuum chambers
Research
Beamline instrumentation
Microscopy
Electronics assembly and inspection
Technology
Drive type: 2-phase stepper motor for high torque even at low velocities and high resolution.
Position measuring: Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Reduced outgassing especially for use in vacuum environments: In particular, the guide and the spindle are lubricated using a very low-outgassing substance. This allows a bakeout temperature of up to 80 °C. This and other modifications to the PI V6 vacuum class make it possible to use this positioner at up to 10-6 hPa.
Positioning | Unit | Tolerance | L-310.021211V6 |
|---|---|---|---|
Minimum incremental motion | µm | typ. | 0.05 |
Unidirectional repeatability | µm | typ. | ±0.05 |
Bidirectional repeatability | µm | typ. | 0.4 |
Reference switch |
|
| Hall effect, N/C contact, 5 V, NPN |
Reference switch repeatability | µm |
| 2 |
Limit switch |
|
| Hall effect, N/C contact, 5 V, NPN |
Integrated sensor |
|
| Incremental linear encoder |
Sensor signal |
|
| Sin/cos, 1 V peak-to-peak |
Sensor signal period | µm |
| 20 |
Mechanical properties | Unit | Tolerance | L-310.021211V6 |
|---|---|---|---|
Permissible push force in X | N | max. | 100 |
Permissible push force in Y | N | max. | 50 |
Permissible push force in Z | N | max. | 55 |
Permissible torque in θX | Nm | max. | 40 |
Permissible torque in θY | Nm | max. | 80 |
Permissible torque in θZ | Nm | max. | 80 |
Holding force in Z, passive | N |
| 50 |
Moved mass in Z, unloaded | kg |
| 0.9 |
Drive screw type |
|
| Ball screw |
Spindle pitch | mm |
| 1 |
Guide |
|
| Crossed roller guide |
Overall mass | kg |
| 2.6 |
Material |
|
| Anodized aluminum |
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
L-310.021211V6
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Precision Z stage suitable for vacuum; 2-phase stepper motor; 26 mm travel range; 55 N load capacity; 7.5 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak; vacuum-compatible to 10-6 hPa
AB-65 L mounting bracket for vertical mounting of linear and rotation stages; aluminum, blank; vacuum-compatible to 10-9 hPa
Vacuum feedthrough, D-sub 15 (m/f), suitable for high vacuum (to 10-6 hPa)
Vacuum feedthrough, HD D-sub 26 (m/f), suitable for high vacuum (to 10-6 hPa)
Vacuum feedthrough, D-sub 9 (m/f), suitable for high vacuum (to 10-6 hPa)
Vacuum feedthrough, CF40 flange, 1 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF63 flange, 3 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF100 flange, 6 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF160 flange, 15 × D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF63 flange, 1 × D-sub 9 (m/m) and 1 x D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF100 flange, 3 × D-sub 9 (m/m) and 3 x D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
Vacuum feedthrough, CF160 flange, 6 × D-sub 9 (m/m) and 6 x D-sub 15 (m/m), suitable for high vacuum (to 10-7 hPa) and ultrahigh vacuum (to 10-9 hPa)
AB-65 L mounting bracket, vacuum-compatible to 10-9 hPa
Mounting bracket for vertical mounting of positioners up to 100 mm in width and up to 300 mm in length; vacuum-compatible to 10-6 hPa
Mounting bracket for vertical mounting of positioners up to 100 mm in width and up to 300 mm in length; vacuum-compatible to 10-9 hPa
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Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
Rotating electric motors such as DC or stepper motors are used in connection with screw or worm drives.
