P-750 Piezo Nanopositioner

High-Load Piezo-Driven Nanopositioner with Direct Position Measuring

Backlash-free, high-precision flexure guides
Load capacity 5 to 10 kg (depending on mounting orientation)
Resolution <1 nm
Direct metrology with capacitive sensors for highest precision
Direct drive for fast response
Travel range 75 µm
Outstanding lifetime due to PICMA^® piezo actuators

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P-750, dimensions in mm

Outstanding lifetime due to PICMA^® piezo actuators

The PICMA^® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA^® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

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Datasheet

Version / Date

2024-07-22

pdf - 491 KB

Version / Date

2024-07-22

pdf - 496 KB

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Select a travel range:

Motion	P-750.20	Tolerance
Active axes	X
Travel range in X	75 µm
Travel range in X, open loop, at -20 to 120 V	75 µm	+20 / -0 %
Angular error around X (roll)	± 10 µrad	typ.
Angular error around Y (pitch)	± 10 µrad	typ.
Positioning	P-750.20	Tolerance
Resolution in X, open loop	0.4 nm	typ.
Integrated sensor	Capacitive, direct position measuring
System resolution in X	1 nm
Drive Properties	P-750.20	Tolerance
Drive type	PICMA®
Electrical capacitance in X	7.7 µF	±20 %
Mechanical Properties	P-750.20	Tolerance
Resonant frequency in X, unloaded	600 Hz	±20 %
Resonant frequency in X, under load with 10 kg	120 Hz	±20 %
Permissible push force in X	100 N	max.
Permissible push force in Z	100 N	max.
Permissible pull force in X	50 N	max.
Permissible pull force in Z	100 N	max.
Guide	Flexure guide with lever amplification
Overall mass	2.55 kg
Miscellaneous	P-750.20	Tolerance
Operating temperature range	-20 to 80 °C °C
Connector	LEMO FFS.00.250.CTCE24
Sensor connector	LEMO FFA.00.250.CTLC31
Cable length	1 m
Recommended controllers / drivers	E-500 • E-501, E-610, E-621, E-625, E-665, E-709, E-754

Resonant frequency in X, under load with 10 kg: With horizontally aligned motion platform.

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.

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Product Note

Version / Date

2021-04-19

pdf - 377 KB

English

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Datasheet

Version / Date

2024-07-22

pdf - 491 KB

Version / Date